Nonlinear damping in micromachined bridge resonators

Abstract This study presents a thorough theoretical and experimental investigation on the nonlinear damping of in-plane micromachined electromechanical resonators. More specifically, experiments are conducted an electrically actuated bridge resonator, primary resonance response system is obtained at various AC DC voltages. A model developed using Euler–Bernoulli beam theory while accounting for geometric, electrostatic (including fringing field effect), nonlinearities. Two models considered in model: Kelvin–Voigt model, which this due to presence geometric The second consists linear, quadratic, cubic terms. high-dimensional discretisation performed, dynamics resonator examined detail regime by constructing frequency diagrams Thorough comparisons between data results different conditions. It shown that microresonator displays strong damping. Detailed calibration procedures proposed, advantages disadvantages each discussed.